Examination of Surfaces by scanning with Charged Particles

A STUDY of the distribution of elements in inhomogeneous samples has assisted many chemical and metallurgical investigations, and in particular the electron probe microanalyser has proved a valuable tool for examining small areas at high resolution. In certain cases, however, a less costly analytica...

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Bibliographic Details
Published in:Nature (London) 1966-07, Vol.211 (5044), p.66-67
Main Authors: PIERCE, T. B, PECK, P. F, CUFF, D. R. A
Format: Article
Language:English
Subjects:
Humanities and Social Sciences
letter
multidisciplinary
Science
Science (multidisciplinary)
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Summary:A STUDY of the distribution of elements in inhomogeneous samples has assisted many chemical and metallurgical investigations, and in particular the electron probe microanalyser has proved a valuable tool for examining small areas at high resolution. In certain cases, however, a less costly analytical instrument of lower resolution is required for scanning larger areas, and for this purpose an X-ray milliprobe analyser has been designed, using a collimated beam of X-rays 1 mm in diameter 1 .
ISSN:0028-0836
1476-4687
DOI:10.1038/211066a0