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Synthesis and characterization of fluorinated β-ketoiminate and imino-alcoholate Pd complexes: precursors for palladium chemical vapor deposition

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Bibliographic Details
Published in:	Journal of materials chemistry 2003-01, Vol.13 (1), p.135-142
Main Authors:	LIU, Yan-Hsiu, CHENG, Yi-Ching, TUNG, Yung-Liang, YUN CHI, CHEN, Yao-Lun, LIU, Chao-Shiuan, PENG, Shie-Ming, LEE, Gene-Hsiang
Format:	Article
Language:	English
Subjects:	Applied sciences Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Inorganic compounds Materials science Metal complexes Metals. Metallurgy Methods of deposition of films and coatings film growth and epitaxy Physics Structure of solids and liquids crystallography Structure of specific crystalline solids
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