Synthesis of ion conducting Li x Al y Si z O thin films by atomic layer deposition

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Bibliographic Details
Published in:Journal of materials chemistry. A, Materials for energy and sustainability Materials for energy and sustainability, 2014, Vol.2 (25), p.9566-9573
Main Authors: Perng, Ya-Chuan, Cho, Jea, Sun, Steven Y., Membreno, Daniel, Cirigliano, Nicolas, Dunn, Bruce, Chang, Jane P.
Format: Article
Language:English
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ISSN:2050-7488
2050-7496
DOI:10.1039/C3TA14928E