Calibration methods in glow discharge optical emission spectroscopy: a tutorial review

Calibration methods used in glow discharge optical emission spectrometry are reviewed. They differ in the ways of handling the variable sputtering rates of different materials. The sputtering rate affects the intensities of emission lines of the elements analyzed and must be corrected for. Algorithm...

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Bibliographic Details
Published in:Journal of analytical atomic spectrometry 2015-01, Vol.3 (5), p.138-149
Main Author: Weiss, Zden k
Format: Article
Language:English
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Summary:Calibration methods used in glow discharge optical emission spectrometry are reviewed. They differ in the ways of handling the variable sputtering rates of different materials. The sputtering rate affects the intensities of emission lines of the elements analyzed and must be corrected for. Algorithms implementing these methods are described, including corrections for line interferences, non-linear calibration functions and the calculation of sputter factors from calibration data. Precision and accuracy are discussed for analysis of medium and high concentrations of the elements and for analysis of low concentrations approaching the limits of detection. Calibration methods used in glow discharge optical emission spectrometry are reviewed.
ISSN:0267-9477
1364-5544
DOI:10.1039/c4ja00482e