Combining electrothermal vaporization inductively coupled plasma mass spectrometry with in situ TMAH thermochemolysis for the direct determination of trace impurities in a polymer-based photoresist

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Bibliographic Details
Published in:Journal of analytical atomic spectrometry 2006-01, Vol.21 (3), p.311
Main Authors: Sun, Yun-chang, Ko, Chu-Jung
Format: Article
Language:English
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ISSN:0267-9477
1364-5544
DOI:10.1039/b512233c