Biocompatible "click" wafer bonding for microfluidic devices

• Published in: Lab on a chip 2012-01, Vol.12 (17), p.332-335
• Main Authors: Saharil, Farizah, Carlborg, Carl Fredrik, Haraldsson, Tommy, van der Wijngaart, Wouter
• Format: Article
• Language: English
• Subjects: Adhesive; Attachment; Biocompatible Materials - chemistry; Bonding; Click Chemistry; Devices; Drying; heterogeneous integration; Microfluidic Analytical Techniques - instrumentation; Microfluidics; OSTE; Polymers - chemistry; Silanes; Silicon - chemistry; Silicon substrates; Solvents - chemistry; Surface Properties; Temperature; Ultraviolet Rays; wafer bonding; Wafers
• ISSN: 1473-0197; 1473-0189; 1473-0189
• DOI: 10.1039/c2lc21098c

We introduce a novel dry wafer bonding concept designed for permanent attachment of micromolded polymer structures to surface functionalized silicon substrates. The method, designed for simultaneous fabrication of many lab-on-chip devices, utilizes a chemically reactive polymer microfluidic structure, which rapidly bonds to a functionalized substrate via "click" chemistry reactions. The microfluidic structure consists of an off-stoichiometry thiol-ene (OSTE) polymer with a very high density of surface bound thiol groups and the substrate is a silicon wafer that has been functionalized with common bio-linker molecules. We demonstrate here void free, and low temperature (< 37 °C) bonding of a batch of OSTE microfluidic layers to a silane functionalized silicon wafer. Novel technique to covalently bond OSTE polymer layer to a silicon substrate using dry wafer bonding at low temperature (< 37 °C).