Excimer-laser photofragmentation of boron trichloride and its implications for laser vapour deposition and doping processes

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Bibliographic Details
Published in:Journal of the Chemical Society. Faraday transactions 1994, Vol.90 (24), p.3633
Main Authors: Georgiou, S., Raptakis, E., Xing, X., Hontzopoulos, E., Vlahoyannis, Y. P.
Format: Article
Language:English
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ISSN:0956-5000
1364-5455
DOI:10.1039/ft9949003633