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Optically and chemically amplified photoresists based on poly(hydroxyaminoester)s

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Bibliographic Details
Published in:	Journal of materials chemistry 1993, Vol.3 (7), p.761
Main Authors:	Vannikov, Anatoli V., Grishina, Antonina D., Tedoradze, Marine G., Kostenko, Leonid I., Anikeev, Alexander V., Koblik, Irina V.
Format:	Article
Language:	English
Citations:	Items that cite this one
Online Access:	Get full text
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