Infrared spectroscopy of Si(111) surfaces after HF treatment: hydrogen termination and surface morphology

Polarized internal reflection spectroscopy has been used to characterize HF-treated Si(111) surfaces. The silicon-hydrogen stretching vibrations indicate that the surface is well ordered, but is microscopically rough, with coupled monohydride, dihydride, and trihydride termination.

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Bibliographic Details
Published in:Applied physics letters 1988-09, Vol.53 (11), p.998-1000
Main Authors: BURROWS, V. A, CHABAL, Y. J, HIGASHI, G. S, RAGHAVACHARI, K, CHRISTAMN, S. B
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Solid-fluid interfaces
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
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Summary:Polarized internal reflection spectroscopy has been used to characterize HF-treated Si(111) surfaces. The silicon-hydrogen stretching vibrations indicate that the surface is well ordered, but is microscopically rough, with coupled monohydride, dihydride, and trihydride termination.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.100053