Auger electron spectroscopy and microscopy with probe-size limited resolution

High spatial resolution Auger electron spectra and images have been obtained by optimizing secondary electron collection efficiency in a scanning transmission electron microscope (STEM). We describe an ultrahigh vacuum, 100 keV STEM which is capable of collecting Auger electron spectra and images wi...

Full description

Saved in:
Bibliographic Details
Published in:Applied physics letters 1991-04, Vol.58 (17), p.1890-1892
Main Authors: HEMBREE, G. G, DRUCKER, J. S, LUO, F. C. H, KRISHNAMURTHY, M, VENABLES, J. A
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:High spatial resolution Auger electron spectra and images have been obtained by optimizing secondary electron collection efficiency in a scanning transmission electron microscope (STEM). We describe an ultrahigh vacuum, 100 keV STEM which is capable of collecting Auger electron spectra and images with edge resolutions of ≤5 nm. Typical spectra and images from the Ge/Si(100) and Ag/Si(100) film growth systems are presented and discussed. These images demonstrate high-resolution elemental mapping which can be used in the study of surface processes on the nanometer scale.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.105064