Target modification in the excimer laser deposition of YBa2Cu3O7-x thin films

Under conditions used for pulsed laser deposition (308 nm, 20 ns, 2–8 J/cm2) of Y-Ba-Cu-O superconducting thin films, we have measured a pronounced decrease in deposition rate with cumulative laser exposure of the target. This decay in rate is accompanied by evolution on the target surface of micros...

Full description

Saved in:
Bibliographic Details
Published in:Applied physics letters 1991-07, Vol.59 (5), p.594-596
Main Authors: FOLTYN, S. R, DYE, R. C, OTT, K. C, PETERSON, E, HUBBARD, K. M, HUTCHINSON, W, MUENCHAUSEN, R. E, ESTLER, R. C, WU, X. D
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Solid surfaces and solid-solid interfaces
Surface and interface dynamics and vibrations
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Under conditions used for pulsed laser deposition (308 nm, 20 ns, 2–8 J/cm2) of Y-Ba-Cu-O superconducting thin films, we have measured a pronounced decrease in deposition rate with cumulative laser exposure of the target. This decay in rate is accompanied by evolution on the target surface of microscopic columnar structures, having yttrium-enriched surfaces, which are aligned in the direction of the incident laser beam (45°). Neither the vapor plume direction nor film stoichiometry is affected by the presence of these oriented, chemically altered surface features.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.106386