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Doping of zinc-selenide-telluride
We investigate the doping behavior of ZnSe/ZnTe short period superlattices. p-type doping is achieved with a dc nitrogen plasma source, n-type doping with chlorine from a ZnCl2 Knudsen source. Even a small Te content has a strong positive effect on p doping: Doping levels in the upper 1019 cm−3 rang...
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Published in: | Applied physics letters 1994-05, Vol.64 (20), p.2682-2684 |
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Main Authors: | , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | We investigate the doping behavior of ZnSe/ZnTe short period superlattices. p-type doping is achieved with a dc nitrogen plasma source, n-type doping with chlorine from a ZnCl2 Knudsen source. Even a small Te content has a strong positive effect on p doping: Doping levels in the upper 1019 cm−3 range are achieved, and ohmic contacts can be obtained even for low carrier concentrations. The data are in excellent agreement with a theory based on the amphoteric native defect model. The opposite is valid for n doping: At Te concentrations above 20% electron concentrations are below 1016 cm−3. As a possible way to get both good n- and p-type doping at the same lattice constant we propose the use of the quaternary compound Zn(1−y)Mg(y)Se(1−x)Te(x). |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.111490 |