Secondary electron emission enhancement and defect contrast from diamond following exposure to atomic hydrogen

Polished nominal (100) surfaces of four types of diamonds were exposed to atomic hydrogen by hot filament cracking of H2 gas or by immersion in a H2 plasma discharge. Both types IIa and IIb (100) diamond surfaces exhibited the following characteristic changes: (a) secondary electron (SE) yield incre...

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Bibliographic Details
Published in:Applied physics letters 1994-04, Vol.64 (15), p.1929-1931
Main Authors: Malta, D. P., Posthill, J. B., Humphreys, T. P., Thomas, R. E., Fountain, G. G., Rudder, R. A., Hudson, G. C., Mantini, M. J., Markunas, R. J.
Format: Article
Language:English
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Summary:Polished nominal (100) surfaces of four types of diamonds were exposed to atomic hydrogen by hot filament cracking of H2 gas or by immersion in a H2 plasma discharge. Both types IIa and IIb (100) diamond surfaces exhibited the following characteristic changes: (a) secondary electron (SE) yield increased by a factor of ∼30 as measured in a scanning electron microscope (SEM), (b) near-surface, nontopographical defects were observable directly using the conventional SE mode of the SEM, (c) surface conductance increased by up to 10 orders of magnitude. These changes were observed only weakly in nitrogen-containing types Ia and Ib diamonds.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.111745