Automated sample transport system for chromatography/secondary ion mass spectrometry

The design of a new sample cell for a large‐scale secondary ion mass spectrometer is described. Unique to this new source chamber is the incorporation of large piezoelectric translator stages capable of 20 cm×20 cm movement with high resolution. In addition, the source chamber is designed so that in...

Full description

Saved in:
Bibliographic Details
Published in:Review of scientific instruments 1989-06, Vol.60 (6), p.1071-1074
Main Authors: Duffin, Kevin L., Flurer, Rick A., Busch, Kenneth L., Sexton, Larry W., Dorsett, John L.
Format: Article
Language:English
Subjects:
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mass spectrometers and related techniques
Physics
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The design of a new sample cell for a large‐scale secondary ion mass spectrometer is described. Unique to this new source chamber is the incorporation of large piezoelectric translator stages capable of 20 cm×20 cm movement with high resolution. In addition, the source chamber is designed so that interchangeable detector assemblies can be fitted to the chamber.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1140319