Loading…

Improved microwave test fixture for brittle substrate materials

A microwave test fixture has been designed and built to hold brittle substrate materials, such as GaAs, without inducing damage. The substrate pressure is adjustable and easily controlled by the use of compression springs. Tests have shown that the holder does not damage GaAs substrates, and produce...

Full description

Saved in:
Bibliographic Details
Published in:Review of scientific instruments 1989-03, Vol.60 (3), p.495-498
Main Authors: McGregor, Douglas S., Weichold, Mark H.
Format: Article
Language:English
Subjects:
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A microwave test fixture has been designed and built to hold brittle substrate materials, such as GaAs, without inducing damage. The substrate pressure is adjustable and easily controlled by the use of compression springs. Tests have shown that the holder does not damage GaAs substrates, and produces repeatable and reliable measurements.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1140407