A new scheme for x‐ray grazing incidence diffraction

A new scheme for x‐ray grazing incidence diffraction (GID) under total external reflection conditions is presented. This simple scheme allows the grazing angles and the scattering angles to be adjusted independently so that the structural and/or the chemical profiles of materials can be determined a...

Full description

Saved in:
Bibliographic Details
Published in:Review of scientific instruments 1991-10, Vol.62 (10), p.2419-2423
Main Authors: Cui, S. F., Mai, Z. H., Wu, L. S., Wang, C. Y., Dai, D. Y.
Format: Article
Language:English
Subjects:
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A new scheme for x‐ray grazing incidence diffraction (GID) under total external reflection conditions is presented. This simple scheme allows the grazing angles and the scattering angles to be adjusted independently so that the structural and/or the chemical profiles of materials can be determined at controlled depths. As an example, Si1−x Ge x /Si superlattice materials were studied. Both commensurate and incommensurate growths between the two quantum wells in the strained‐layer superlattice were observed by the GID technique.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1142257