Characterization and stabilization of an electron‐cyclotron resonance plasma source using an automatic microwave tuner

An automatic microwave stub tuner (AST) has been developed and used to characterize and stabilize an electron‐cyclotron resonance (ECR) plasma source. The tuner provides a new method for measuring plasma impedance dynamically without disturbing the plasma. The Ar ECR plasmas were excited by a 2.45 G...

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Bibliographic Details
Published in:Review of Scientific Instruments 1992-04, Vol.63 (4), p.2547-2549
Main Authors: Minomo, S., Kondo, K., Yoshizako, Y., Ishida, Y., Taniguchi, M.
Format: Article
Language:English
Subjects:
Atomic, molecular and charged-particle sources and detectors
Charged-particle beam sources and detectors
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
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Summary:An automatic microwave stub tuner (AST) has been developed and used to characterize and stabilize an electron‐cyclotron resonance (ECR) plasma source. The tuner provides a new method for measuring plasma impedance dynamically without disturbing the plasma. The Ar ECR plasmas were excited by a 2.45 GHz microwave (
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1142884