A scanning tunneling microscope adapted to a 3‐in. molecular‐beam‐epitaxy system

The combination of a custom‐made scanning tunneling microscope with a commercial molecular‐beam‐epitaxy (MBE) system for 3‐in. wafers is reported. The design of the microscope allows the exchange of the tip and piezo scanning unit in ultrahigh vacuum, thus offering the possibility to apply various l...

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Bibliographic Details
Published in:Review of scientific instruments 1992-02, Vol.63 (2), p.1676-1679
Main Authors: Stalder, Roland, Gübeli, Hans‐Jürg, von Känel, Hans, Wachter, Peter
Format: Article
Language:English
Subjects:
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Other topics in instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
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Summary:The combination of a custom‐made scanning tunneling microscope with a commercial molecular‐beam‐epitaxy (MBE) system for 3‐in. wafers is reported. The design of the microscope allows the exchange of the tip and piezo scanning unit in ultrahigh vacuum, thus offering the possibility to apply various local probe techniques with the same instrument. The tip can be cleaned by baking and by Ar+‐ion sputtering. Good thermal stability and stiffness of the microscope is obtained by a lever‐type design using two similar parallel piezo tubes for the scanner and for a mechanical contact close to the tip, respectively. A two‐stage spring vibration isolation with internal viscous damping is used to achieve good mechanical stability for atomic‐scale resolution without any further vibration isolation of the MBE system.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1143322