Ultrahigh vacuum surface science chamber with integral scanning tunneling microscope

The construction of an ultrahigh vacuum (UHV) surface science chamber equipped with the standard surface analytical techniques and a connected companion UHV chamber containing a scanning tunneling microscope (STM) has been completed. The novel aspects of this experimental system are: the combination...

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Bibliographic Details
Published in:Review of scientific instruments 1994-01, Vol.65 (1), p.75-79
Main Authors: Leavitt, Andrew J., Han, Taejoon, Williams, John M., Bryner, Roger S., Patrick, David L., Rabke, Carol E., Beebe, Thomas P.
Format: Article
Language:English
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Summary:The construction of an ultrahigh vacuum (UHV) surface science chamber equipped with the standard surface analytical techniques and a connected companion UHV chamber containing a scanning tunneling microscope (STM) has been completed. The novel aspects of this experimental system are: the combination of many spatially averaging techniques with STM; a sample holder which is capable of in situ transfer between these various capabilities; variable temperature operation; in situ tip‐sample approach without mechanical feedthroughs; and various novel software aspects. The sample transfer mechanism allows the sample to be transferred onto the main manipulator and heated or cooled with thermocouple monitoring while electrical isolation from the chamber ground is maintained. The sample then can be transferred in vacuo to the UHV STM for further study. STM tips can be transferred into and out of vacuum and positioned for sputtering and UHV analysis. The various design details which allow for in vacuo transfers will be discussed.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1144749