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How to select the best condition for operating a positive ion source of molecular beam surface ionization typea
In easily attainable high vacua (P r ≊20–0.2 μTorr), the efficiency (β+) for producing ions (M+) from diatomic molecules (MX) incident on a polycrystalline surface of W, Mo, or Re was measured as a function of surface temperature (T≊800–2300 K). Theoretical analysis of β+ elucidated the temperature...
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Published in: | Review of scientific instruments 1994-05, Vol.65 (5), p.1766-1769 |
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Main Authors: | , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | In easily attainable high vacua (P
r
≊20–0.2 μTorr), the efficiency (β+) for producing ions (M+) from diatomic molecules (MX) incident on a polycrystalline surface of W, Mo, or Re was measured as a function of surface temperature (T≊800–2300 K). Theoretical analysis of β+ elucidated the temperature dependence of the effective work function (φ+) for the ionization. Namely, (1) above ∼2000 K, each surface is kept virtually clean, having φ+≊5.2, 4.9, and 5.4 eV for W, Mo, and Re, respectively. (2) At ∼1400–1200 K, the range of which depends upon P
r
, φ+ is increased up to ∼7 eV by adsorption of residual gas molecules (RGM), thereby yielding β+=1 for even Tl and the current density of ∼10 μA cm−2 for the flux of 1014 molecules cm−2 s−1. (3) Below ∼1200 K, however, φ+ is much decreased by coadsorption of MX and RGM. A theoretical diagram of T vs φ+ is devised to predict the best condition for β+=1. The best condition (φ+, T, and P
r
) to make β+ as large as possible may readily be selected according to the diagram and the present data on φ+. |
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ISSN: | 0034-6748 1089-7623 |
DOI: | 10.1063/1.1144875 |