Design and investigation of a microwave plasma cathode

The physical consideration, design, and characteristics of a compact microwave plasma cathode are expounded in this paper. The impedance matching is calculated to improve the microwave transmission efficiency. The influence of the magnetic field on the discharge property and the extracted electron b...

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Bibliographic Details
Published in:Review of Scientific Instruments 1994-04, Vol.65 (4), p.1316-1318
Main Authors: Rao, Yusheng, Zhang, Yong, Wu, Jiannan, Qi, Lei
Format: Article
Language:English
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Summary:The physical consideration, design, and characteristics of a compact microwave plasma cathode are expounded in this paper. The impedance matching is calculated to improve the microwave transmission efficiency. The influence of the magnetic field on the discharge property and the extracted electron beam current is investigated. The off‐resonance discharge mode (a non‐ECR discharge mode) is put forward, in which the magnetic field is bigger than 875 G in the discharge chamber. The dependence of the extracted electron beam current on the extraction voltage, the input microwave power, and the operation pressure is described. The 2.45‐GHz microwave power is transmitted to the cathode via a coaxial line. The permanent magnets made from NdFeB are used to excite the magnetic field and the magnetic induction of 800–2600 G can be produced. This cathode can obtain the electron beam current of up to 500 mA at the input microwave power of 30–60 W, with N2 used as the support gas.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1144996