Discharge mechanism of the Kyoto University‐type microwave plasma cathode or microwave ion source

In this paper the discharge mechanism of the Kyoto University‐type microwave plasma cathode is studied. The relationship between the electron‐absorbed power p e and electron impact frequency γ c is obtained. When B=875 G, p e decreases with the increment of γ c . At the same time when γ c →0 or γ c...

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Bibliographic Details
Published in:Review of Scientific Instruments 1994-04, Vol.65 (4), p.1127-1128
Main Authors: Rao, Yusheng, Wu, Jiannan, Yan, Yuhong, Zhang, Yong, Qi, Lei
Format: Article
Language:English
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Summary:In this paper the discharge mechanism of the Kyoto University‐type microwave plasma cathode is studied. The relationship between the electron‐absorbed power p e and electron impact frequency γ c is obtained. When B=875 G, p e decreases with the increment of γ c . At the same time when γ c →0 or γ c ≪ω, electron cyclotron resonance (ECR) discharge will be set up. When B≳875 G and γ c =107–108 s−1, the off‐resonance discharge exists. With γ c increased up to a certain limit, it follows that when ω z ‖γ=ω=(2×3−1/2)1/2ω, a new type of discharge, the so‐called double resonance (DR) discharge, occurs. For the Kyoto University‐type MPC or MIS, the off‐resonance discharge and DR discharge can be satisfied and it is verified by experiment.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1145086