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Discharge mechanism of the Kyoto University‐type microwave plasma cathode or microwave ion source
In this paper the discharge mechanism of the Kyoto University‐type microwave plasma cathode is studied. The relationship between the electron‐absorbed power p e and electron impact frequency γ c is obtained. When B=875 G, p e decreases with the increment of γ c . At the same time when γ c →0 or γ c...
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Published in: | Review of Scientific Instruments 1994-04, Vol.65 (4), p.1127-1128 |
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Language: | English |
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container_end_page | 1128 |
container_issue | 4 |
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container_title | Review of Scientific Instruments |
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creator | Rao, Yusheng Wu, Jiannan Yan, Yuhong Zhang, Yong Qi, Lei |
description | In this paper the discharge mechanism of the Kyoto University‐type microwave plasma cathode is studied. The relationship between the electron‐absorbed power p
e
and electron impact frequency γ
c
is obtained. When B=875 G, p
e
decreases with the increment of γ
c
. At the same time when γ
c
→0 or γ
c
≪ω, electron cyclotron resonance (ECR) discharge will be set up. When B≳875 G and γ
c
=107–108 s−1, the off‐resonance discharge exists. With γ
c
increased up to a certain limit, it follows that when ω
z
‖γ=ω=(2×3−1/2)1/2ω, a new type of discharge, the so‐called double resonance (DR) discharge, occurs. For the Kyoto University‐type MPC or MIS, the off‐resonance discharge and DR discharge can be satisfied and it is verified by experiment. |
doi_str_mv | 10.1063/1.1145086 |
format | article |
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e
and electron impact frequency γ
c
is obtained. When B=875 G, p
e
decreases with the increment of γ
c
. At the same time when γ
c
→0 or γ
c
≪ω, electron cyclotron resonance (ECR) discharge will be set up. When B≳875 G and γ
c
=107–108 s−1, the off‐resonance discharge exists. With γ
c
increased up to a certain limit, it follows that when ω
z
‖γ=ω=(2×3−1/2)1/2ω, a new type of discharge, the so‐called double resonance (DR) discharge, occurs. For the Kyoto University‐type MPC or MIS, the off‐resonance discharge and DR discharge can be satisfied and it is verified by experiment.</description><identifier>ISSN: 0034-6748</identifier><identifier>EISSN: 1089-7623</identifier><identifier>DOI: 10.1063/1.1145086</identifier><identifier>CODEN: RSINAK</identifier><language>eng</language><ispartof>Review of Scientific Instruments, 1994-04, Vol.65 (4), p.1127-1128</ispartof><rights>American Institute of Physics</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c297t-54648186a3ce38e27d893f1be7c045a8469a35ada39b4bbd2fdb844c5419994f3</citedby><cites>FETCH-LOGICAL-c297t-54648186a3ce38e27d893f1be7c045a8469a35ada39b4bbd2fdb844c5419994f3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://pubs.aip.org/rsi/article-lookup/doi/10.1063/1.1145086$$EHTML$$P50$$Gscitation$$H</linktohtml><link.rule.ids>309,310,314,780,782,784,789,790,795,1558,23928,23929,25138,27922,27923,76153,76160</link.rule.ids></links><search><creatorcontrib>Rao, Yusheng</creatorcontrib><creatorcontrib>Wu, Jiannan</creatorcontrib><creatorcontrib>Yan, Yuhong</creatorcontrib><creatorcontrib>Zhang, Yong</creatorcontrib><creatorcontrib>Qi, Lei</creatorcontrib><title>Discharge mechanism of the Kyoto University‐type microwave plasma cathode or microwave ion source</title><title>Review of Scientific Instruments</title><description>In this paper the discharge mechanism of the Kyoto University‐type microwave plasma cathode is studied. The relationship between the electron‐absorbed power p
e
and electron impact frequency γ
c
is obtained. When B=875 G, p
e
decreases with the increment of γ
c
. At the same time when γ
c
→0 or γ
c
≪ω, electron cyclotron resonance (ECR) discharge will be set up. When B≳875 G and γ
c
=107–108 s−1, the off‐resonance discharge exists. With γ
c
increased up to a certain limit, it follows that when ω
z
‖γ=ω=(2×3−1/2)1/2ω, a new type of discharge, the so‐called double resonance (DR) discharge, occurs. For the Kyoto University‐type MPC or MIS, the off‐resonance discharge and DR discharge can be satisfied and it is verified by experiment.</description><issn>0034-6748</issn><issn>1089-7623</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1994</creationdate><recordtype>article</recordtype><recordid>eNp9kMFKAzEYhIMoWKsH3yBXha35N9lscpRqVSx4seclm01spNssSazszUfwGX0SV1pUEJzLP_B_DMMgdApkAoTTC5gAsIIIvodGQITMSp7TfTQihLKMl0wcoqMYn8mgAmCE9JWLeqnCk8GtGczaxRZ7i9PS4PveJ48Xa7cxIbrUf7y9p74bQKeDf1Ubg7uViq3CWqWlbwz24dfP-TWO_iVoc4wOrFpFc7K7Y7SYXT9Ob7P5w83d9HKe6VyWKSsYZwIEV1QbKkxeNkJSC7UpNWGFEoxLRQvVKCprVtdNbptaMKYLBlJKZukYnW1zhwoxBmOrLrhWhb4CUn2tU0G1W2dgz7ds1C6pNJT9hjc-_IBV19j_4L_Jn-PydbU</recordid><startdate>19940401</startdate><enddate>19940401</enddate><creator>Rao, Yusheng</creator><creator>Wu, Jiannan</creator><creator>Yan, Yuhong</creator><creator>Zhang, Yong</creator><creator>Qi, Lei</creator><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>19940401</creationdate><title>Discharge mechanism of the Kyoto University‐type microwave plasma cathode or microwave ion source</title><author>Rao, Yusheng ; Wu, Jiannan ; Yan, Yuhong ; Zhang, Yong ; Qi, Lei</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c297t-54648186a3ce38e27d893f1be7c045a8469a35ada39b4bbd2fdb844c5419994f3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1994</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Rao, Yusheng</creatorcontrib><creatorcontrib>Wu, Jiannan</creatorcontrib><creatorcontrib>Yan, Yuhong</creatorcontrib><creatorcontrib>Zhang, Yong</creatorcontrib><creatorcontrib>Qi, Lei</creatorcontrib><collection>CrossRef</collection><jtitle>Review of Scientific Instruments</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Rao, Yusheng</au><au>Wu, Jiannan</au><au>Yan, Yuhong</au><au>Zhang, Yong</au><au>Qi, Lei</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Discharge mechanism of the Kyoto University‐type microwave plasma cathode or microwave ion source</atitle><jtitle>Review of Scientific Instruments</jtitle><date>1994-04-01</date><risdate>1994</risdate><volume>65</volume><issue>4</issue><spage>1127</spage><epage>1128</epage><pages>1127-1128</pages><issn>0034-6748</issn><eissn>1089-7623</eissn><coden>RSINAK</coden><abstract>In this paper the discharge mechanism of the Kyoto University‐type microwave plasma cathode is studied. The relationship between the electron‐absorbed power p
e
and electron impact frequency γ
c
is obtained. When B=875 G, p
e
decreases with the increment of γ
c
. At the same time when γ
c
→0 or γ
c
≪ω, electron cyclotron resonance (ECR) discharge will be set up. When B≳875 G and γ
c
=107–108 s−1, the off‐resonance discharge exists. With γ
c
increased up to a certain limit, it follows that when ω
z
‖γ=ω=(2×3−1/2)1/2ω, a new type of discharge, the so‐called double resonance (DR) discharge, occurs. For the Kyoto University‐type MPC or MIS, the off‐resonance discharge and DR discharge can be satisfied and it is verified by experiment.</abstract><doi>10.1063/1.1145086</doi><tpages>2</tpages></addata></record> |
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identifier | ISSN: 0034-6748 |
ispartof | Review of Scientific Instruments, 1994-04, Vol.65 (4), p.1127-1128 |
issn | 0034-6748 1089-7623 |
language | eng |
recordid | cdi_crossref_primary_10_1063_1_1145086 |
source | American Institute of Physics (AIP) Publications; AIP Digital Archive |
title | Discharge mechanism of the Kyoto University‐type microwave plasma cathode or microwave ion source |
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