An electrostatic analyzer for surface structure measurements by low‐energy‐ion‐scattering

A cylindrical electrode electrostatic analyzer has been designed for surface structure measurements which has sufficient sensitivity that shadowing/blocking data can be obtained without significantly damaging the surface structure. A modification to the standard π/√2 design compensates for that part...

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Bibliographic Details
Published in:Review of scientific instruments 1995-05, Vol.66 (5), p.3273-3279
Main Authors: Hird, B., Gauthier, P., Armstrong, R. A.
Format: Article
Language:English
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Summary:A cylindrical electrode electrostatic analyzer has been designed for surface structure measurements which has sufficient sensitivity that shadowing/blocking data can be obtained without significantly damaging the surface structure. A modification to the standard π/√2 design compensates for that part of the spread in the ion energies due to elastic scattering kinematics. The analyzer is small enough to fit inside a standard 25 cm diameter UHV chamber on a turntable, allowing angular distribution measurements over a wide range of scattering angles. An example of a shadowing/blocking angular scan of a clean Si(100) surface is shown.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1145493