Control at 11.4 nm of an XUV Schwarzschild objective

The progress in the quality of XUV and soft x‐ray optics requires adapted methods of control. Knife‐edge methods have numerous interesting aspects, yielding the information that is usually sought in optical systems. Preliminary results are given, obtained with a simple XUV photodiode as detector....

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Bibliographic Details
Published in:Review of Scientific Instruments 1995-02, Vol.66 (2), p.2184-2186
Main Authors: Mercier, R., Polack, F., Fournet, P., Tissot, G., Marioge, J. P.
Format: Article
Language:English
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Summary:The progress in the quality of XUV and soft x‐ray optics requires adapted methods of control. Knife‐edge methods have numerous interesting aspects, yielding the information that is usually sought in optical systems. Preliminary results are given, obtained with a simple XUV photodiode as detector.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1145699