Vacuum ultraviolet rare gas excimer light source

A dc electron beam at 20 keV is used for the excitation of pure rare gases at pressures up to 1.7 bar. The well known second excimer continua of argon, krypton, and xenon observed under these excitation conditions provide an efficient light source in the vacuum ultraviolet spectral region between 12...

Full description

Saved in:
Bibliographic Details
Published in:Review of scientific instruments 1997-03, Vol.68 (3), p.1360-1364
Main Authors: Wieser, J., Murnick, D. E., Ulrich, A., Huggins, H. A., Liddle, A., Brown, W. L.
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A dc electron beam at 20 keV is used for the excitation of pure rare gases at pressures up to 1.7 bar. The well known second excimer continua of argon, krypton, and xenon observed under these excitation conditions provide an efficient light source in the vacuum ultraviolet spectral region between 120 and 200 nm. Thin (300 nm) SiN x foils are used as entrance windows for the low energy electron beam. Due to the flexibility of the production process of the thin foils one can consider various shapes and sizes of the light emitting region to be manufactured. Efficiencies of ∼30% are observed for the conversion of electron beam energy into light.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1147942