Capacitive sensor for micropositioning in two dimensions

A compact sensor for measuring position in two dimensions has been developed. The device, operating on the principle that the capacitance of parallel plate electrodes depends on their mutual area of overlap, is compatible with high magnetic fields and cryogenic temperatures. A resolution of approxim...

Full description

Saved in:
Bibliographic Details
Published in:Review of scientific instruments 1998-01, Vol.69 (1), p.310-312
Main Authors: Kolb, P. W., Decca, R. S., Drew, H. D.
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
cited_by cdi_FETCH-LOGICAL-c332t-861d52d166d2073423684049ac7384991a8a90f582c570b5969e3de2f2ade7263
cites cdi_FETCH-LOGICAL-c332t-861d52d166d2073423684049ac7384991a8a90f582c570b5969e3de2f2ade7263
container_end_page 312
container_issue 1
container_start_page 310
container_title Review of scientific instruments
container_volume 69
creator Kolb, P. W.
Decca, R. S.
Drew, H. D.
description A compact sensor for measuring position in two dimensions has been developed. The device, operating on the principle that the capacitance of parallel plate electrodes depends on their mutual area of overlap, is compatible with high magnetic fields and cryogenic temperatures. A resolution of approximately 1.2 μm has been achieved and is limited by the electronics used. The position reproducibility, which is limited by drift of the positioner used to test the sensor, has been measured to be better than 3 μm.
doi_str_mv 10.1063/1.1148515
format article
fullrecord <record><control><sourceid>scitation_cross</sourceid><recordid>TN_cdi_crossref_primary_10_1063_1_1148515</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>rsi</sourcerecordid><originalsourceid>FETCH-LOGICAL-c332t-861d52d166d2073423684049ac7384991a8a90f582c570b5969e3de2f2ade7263</originalsourceid><addsrcrecordid>eNqdj01LxDAQhoMoWFcP_oNeFbpm8p2jFF2FBS96DrFJJGKbkpQV_71ZdsG7A8PAzMPwPghdA14DFvQO1gBMceAnqAGsdCcFoaeowZiyTkimztFFKZ-4FgdokOrtbIe4xJ1vi59Kym2oPcYhpzmVekhTnD7aOLXLd2pdHCtUd-USnQX7VfzVca7Q2-PDa__UbV82z_39thsoJUunBDhOHAjhCJaUESoUw0zbQVLFtAarrMaBKzJwid-5FtpT50kg1nlJBF2hm8PfGqiU7IOZcxxt_jGAzV7ZgDkqV_b2wJZqZPfR_wfvUv4DzewC_QVDNGOl</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Capacitive sensor for micropositioning in two dimensions</title><source>American Institute of Physics (AIP) Publications</source><source>AIP Digital Archive</source><creator>Kolb, P. W. ; Decca, R. S. ; Drew, H. D.</creator><creatorcontrib>Kolb, P. W. ; Decca, R. S. ; Drew, H. D.</creatorcontrib><description>A compact sensor for measuring position in two dimensions has been developed. The device, operating on the principle that the capacitance of parallel plate electrodes depends on their mutual area of overlap, is compatible with high magnetic fields and cryogenic temperatures. A resolution of approximately 1.2 μm has been achieved and is limited by the electronics used. The position reproducibility, which is limited by drift of the positioner used to test the sensor, has been measured to be better than 3 μm.</description><identifier>ISSN: 0034-6748</identifier><identifier>EISSN: 1089-7623</identifier><identifier>DOI: 10.1063/1.1148515</identifier><identifier>CODEN: RSINAK</identifier><language>eng</language><ispartof>Review of scientific instruments, 1998-01, Vol.69 (1), p.310-312</ispartof><rights>American Institute of Physics</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c332t-861d52d166d2073423684049ac7384991a8a90f582c570b5969e3de2f2ade7263</citedby><cites>FETCH-LOGICAL-c332t-861d52d166d2073423684049ac7384991a8a90f582c570b5969e3de2f2ade7263</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://pubs.aip.org/rsi/article-lookup/doi/10.1063/1.1148515$$EHTML$$P50$$Gscitation$$H</linktohtml><link.rule.ids>314,780,782,784,795,1559,27924,27925,76383,76390</link.rule.ids></links><search><creatorcontrib>Kolb, P. W.</creatorcontrib><creatorcontrib>Decca, R. S.</creatorcontrib><creatorcontrib>Drew, H. D.</creatorcontrib><title>Capacitive sensor for micropositioning in two dimensions</title><title>Review of scientific instruments</title><description>A compact sensor for measuring position in two dimensions has been developed. The device, operating on the principle that the capacitance of parallel plate electrodes depends on their mutual area of overlap, is compatible with high magnetic fields and cryogenic temperatures. A resolution of approximately 1.2 μm has been achieved and is limited by the electronics used. The position reproducibility, which is limited by drift of the positioner used to test the sensor, has been measured to be better than 3 μm.</description><issn>0034-6748</issn><issn>1089-7623</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1998</creationdate><recordtype>article</recordtype><recordid>eNqdj01LxDAQhoMoWFcP_oNeFbpm8p2jFF2FBS96DrFJJGKbkpQV_71ZdsG7A8PAzMPwPghdA14DFvQO1gBMceAnqAGsdCcFoaeowZiyTkimztFFKZ-4FgdokOrtbIe4xJ1vi59Kym2oPcYhpzmVekhTnD7aOLXLd2pdHCtUd-USnQX7VfzVca7Q2-PDa__UbV82z_39thsoJUunBDhOHAjhCJaUESoUw0zbQVLFtAarrMaBKzJwid-5FtpT50kg1nlJBF2hm8PfGqiU7IOZcxxt_jGAzV7ZgDkqV_b2wJZqZPfR_wfvUv4DzewC_QVDNGOl</recordid><startdate>199801</startdate><enddate>199801</enddate><creator>Kolb, P. W.</creator><creator>Decca, R. S.</creator><creator>Drew, H. D.</creator><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>199801</creationdate><title>Capacitive sensor for micropositioning in two dimensions</title><author>Kolb, P. W. ; Decca, R. S. ; Drew, H. D.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c332t-861d52d166d2073423684049ac7384991a8a90f582c570b5969e3de2f2ade7263</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1998</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Kolb, P. W.</creatorcontrib><creatorcontrib>Decca, R. S.</creatorcontrib><creatorcontrib>Drew, H. D.</creatorcontrib><collection>CrossRef</collection><jtitle>Review of scientific instruments</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Kolb, P. W.</au><au>Decca, R. S.</au><au>Drew, H. D.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Capacitive sensor for micropositioning in two dimensions</atitle><jtitle>Review of scientific instruments</jtitle><date>1998-01</date><risdate>1998</risdate><volume>69</volume><issue>1</issue><spage>310</spage><epage>312</epage><pages>310-312</pages><issn>0034-6748</issn><eissn>1089-7623</eissn><coden>RSINAK</coden><abstract>A compact sensor for measuring position in two dimensions has been developed. The device, operating on the principle that the capacitance of parallel plate electrodes depends on their mutual area of overlap, is compatible with high magnetic fields and cryogenic temperatures. A resolution of approximately 1.2 μm has been achieved and is limited by the electronics used. The position reproducibility, which is limited by drift of the positioner used to test the sensor, has been measured to be better than 3 μm.</abstract><doi>10.1063/1.1148515</doi><tpages>3</tpages><oa>free_for_read</oa></addata></record>
fulltext fulltext
identifier ISSN: 0034-6748
ispartof Review of scientific instruments, 1998-01, Vol.69 (1), p.310-312
issn 0034-6748
1089-7623
language eng
recordid cdi_crossref_primary_10_1063_1_1148515
source American Institute of Physics (AIP) Publications; AIP Digital Archive
title Capacitive sensor for micropositioning in two dimensions
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-04T10%3A09%3A38IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-scitation_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Capacitive%20sensor%20for%20micropositioning%20in%20two%20dimensions&rft.jtitle=Review%20of%20scientific%20instruments&rft.au=Kolb,%20P.%20W.&rft.date=1998-01&rft.volume=69&rft.issue=1&rft.spage=310&rft.epage=312&rft.pages=310-312&rft.issn=0034-6748&rft.eissn=1089-7623&rft.coden=RSINAK&rft_id=info:doi/10.1063/1.1148515&rft_dat=%3Cscitation_cross%3Ersi%3C/scitation_cross%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c332t-861d52d166d2073423684049ac7384991a8a90f582c570b5969e3de2f2ade7263%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true