In   situ infrared spectroscopy as a real time diagnostic for plasma polymer film deposition

In situ Fourier transform infrared spectroscopy (FTIR)/attenuated total reflection (ATR) was used to study the deposition of plasma polymerized methyl methacrylate (PPMMA) film. Real time absorption spectra of PPMMA films were obtained at a time resolution of 20–30 s which is mostly limited by the l...

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Bibliographic Details
Published in:Applied physics letters 1996-06, Vol.68 (24), p.3386-3388
Main Authors: Pan, Y. Vickie, Barrios, Ernesto Z., Denton, Denice D.
Format: Article
Language:English
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Summary:In situ Fourier transform infrared spectroscopy (FTIR)/attenuated total reflection (ATR) was used to study the deposition of plasma polymerized methyl methacrylate (PPMMA) film. Real time absorption spectra of PPMMA films were obtained at a time resolution of 20–30 s which is mostly limited by the low optical throughput and low signal-to-noise ratio. Postplasma dynamics observed in the system demonstrate the need for an in situ and real time film diagnostic technique. This letter reports the use of this diagnostic on plasma deposited polymers.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.116512