Temperature-dependent orientation of diamond films on titanium and structural evolution of interfacial layers

• Published in: Applied physics letters 1996-12, Vol.69 (27), p.4176-4178
• Main Authors: Cappuccio, Giorgio, Sessa, Vito, Terranova, Maria Letizia
• Format: Article
• Language: English
• ISSN: 0003-6951; 1077-3118
• DOI: 10.1063/1.116977

X-ray diffraction analytical techniques have been used to investigate the influence of the deposition temperature (650–850 °C) on the composition and microstructure of the transition layers formed at the interface between titanium substrates and diamond thin films. The diamond coatings were produced by hot-filament chemical vapor deposition using a 1% methane/hydrogen mixture. X-ray diffraction analysis, performed both through θ–2θ scans and at grazing incidence, allowed investigation of the crystallographic properties and of the structural evolution of the various phases (TiC, TiH2, α-Ti) generated inside the intermediate reaction layers. The temperature-dependent orientation of diamond crystallites is discussed with reference to the complex structure of these interfacial layers.