Mass spectrometric determination of the percent dissociation of a high-density chlorine plasma

Recent computer modeling of high-density chlorine plasmas has indicated that the gas is highly dissociated. This important prediction has only been recently confirmed by optical measurements, which require either external or internal calibration. Unfortunately, these optical techniques cannot readil...

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Bibliographic Details
Published in:Applied physics letters 1997-12, Vol.71 (22), p.3206-3208
Main Authors: Gaddy, G. A., Webb, S. F., Blumenthal, Rik
Format: Article
Language:English
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Summary:Recent computer modeling of high-density chlorine plasmas has indicated that the gas is highly dissociated. This important prediction has only been recently confirmed by optical measurements, which require either external or internal calibration. Unfortunately, these optical techniques cannot readily be applied to the more chemically complex multicomponent plasmas commonly used in real processing. Using a new mass spectrometric method capable of detecting the local concentrations of both atomic and molecular atomic species within a plasma, a percent molecular dissociation of >85% has been measured in an electron cyclotron resonance chlorine plasma at low pressures.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.120291