Relaxed template for fabricating regularly distributed quantum dot arrays

Relaxed SiGe thin films are used as templates to control the nucleation of three-dimensional Ge islands on Si(100) substrates. Using the relaxed template, Ge islands form a rectangular array with all islands located exclusively above the intersections of dislocations. The registration is lost when t...

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Bibliographic Details
Published in:Applied physics letters 1997-12, Vol.71 (24), p.3567-3568
Main Authors: Xie, Y. H., Samavedam, S. B., Bulsara, M., Langdo, T. A., Fitzgerald, E. A.
Format: Article
Language:English
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Summary:Relaxed SiGe thin films are used as templates to control the nucleation of three-dimensional Ge islands on Si(100) substrates. Using the relaxed template, Ge islands form a rectangular array with all islands located exclusively above the intersections of dislocations. The registration is lost when the Ge growth temperature is lowered to 300 °C, and the Ge coverage is decreased to 0.4 nm.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.120393