Transverse surface acoustic wave detection by scanning acoustic force microscopy

We present a scanning acoustic force microscope (SAFM) for the study of surface acoustic wave (SAW) phenomena on the submicron lateral scale. Until now, SAWs with in-plane oscillation components could only be studied effectively via nonvanishing out-of-plane oscillation contributions. By operating t...

Full description

Saved in:
Bibliographic Details
Published in:Applied physics letters 1998-08, Vol.73 (7), p.882-884
Main Authors: Behme, G., Hesjedal, T., Chilla, E., Fröhlich, H.-J.
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:We present a scanning acoustic force microscope (SAFM) for the study of surface acoustic wave (SAW) phenomena on the submicron lateral scale. Until now, SAWs with in-plane oscillation components could only be studied effectively via nonvanishing out-of-plane oscillation contributions. By operating the microscope in lateral force mode, where both bending and torsion of the cantilever are detected, additional amplitude-dependent signals are found, which are due to the interaction with purely in-plane polarized surface oscillations. To demonstrate the capabilities of this type of SAFM, Love waves were studied on the surface of layers deposited on ST-cut quartz with SAW propagation perpendicular to the crystal X-axis. The phase velocity of the wave as well as the amplitude of a standing wave field was measured and compared to calculated values.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.122026