Modulated rf discharges as an effective tool for selecting excited species

Modulated NH3-fed rf glow discharges have been investigated; the emissions of the active species NH* and N2* have been collected during the modulation period (time on+time off). In this study, modulated discharges have been characterized by a constant time on of 7 ms and a tunable time off in the ra...

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Bibliographic Details
Published in:Applied physics letters 1999-07, Vol.75 (1), p.37-39
Main Authors: Cicala, Grazia, Creatore, Mariadriana, Favia, Pietro, Lamendola, Ritalba, d’Agostino, Riccardo
Format: Article
Language:English
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Summary:Modulated NH3-fed rf glow discharges have been investigated; the emissions of the active species NH* and N2* have been collected during the modulation period (time on+time off). In this study, modulated discharges have been characterized by a constant time on of 7 ms and a tunable time off in the range of 0–1000 ms. It has been found that the power modulation represents an effective tool for selecting excited species: this procedure may be exploited in surface grafting treatments of polymers where high selectivity of chemical groups is requested, e.g., for preferentially grafting −NH2 groups onto polyethylene with respect to all other N-containing functionalities.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.124269