Structure observed in measured electron energy distribution functions in capacitively coupled radio frequency hydrogen plasmas

• Published in: Applied physics letters 1999-07, Vol.75 (3), p.331-333
• Main Authors: Mahony, C. M. O., McFarland, J., Steen, P. G., Graham, W. G.
• Format: Article
• Language: English
• ISSN: 0003-6951; 1077-3118
• DOI: 10.1063/1.124366

Electron energy probability functions measured with a passively compensated Langmuir probe in asymmetric capacitively coupled hydrogen and deuterium plasmas exhibit structure. The otherwise relatively continuous distribution appears to have an abrupt peak in electron density near 5 eV. This structure occurs at a higher energy in deuterium than hydrogen and there is a correlation between floating potential and the voltage at which the structure is observed in the second derivative of the I(V) characteristic. While the cause of the structure has yet to be clarified, spectroscopic observations and computer-based hydrogen models indicate that the high energy tail of the distribution is strongly modulated during the radio frequency cycle. The effect of this modulation on plasma properties and probe measurements has yet to be explored.