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The interplay of sputtering and oxidation during plasma diffusion treatment

Metals that form dense native surface oxide layers challenge plasma diffusion treatment techniques. Experimental results obtained during nitriding of stainless steel from real-time depth-resolved compositional analysis by elastic recoil detection give insight into the transport kinetics. In agreemen...

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Bibliographic Details
Published in:Applied physics letters 1999-09, Vol.75 (13), p.1851-1853
Main Authors: Parascandola, S., Kruse, O., Möller, W.
Format: Article
Language:English
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Summary:Metals that form dense native surface oxide layers challenge plasma diffusion treatment techniques. Experimental results obtained during nitriding of stainless steel from real-time depth-resolved compositional analysis by elastic recoil detection give insight into the transport kinetics. In agreement with semiquantitative considerations on the oxide removal and the oxide growth, the interplay of sputtering and oxidation emerges as a key parameter. On this background, suggestions for practical applications and optimization of the modification processes are given for different plasma diffusion treatment techniques.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.124849