Rectangular nanovoids in helium-implanted and thermally annealed MgO(100)

Cleaved MgO(100) single crystals were implanted with 30 keV He3 ions with doses varying from 1×1019 to 1×1020 m−2 and subsequently thermally annealed from 100 to 1100 °C. Transmission electron microscopy observations revealed the existence of sharply rectangular nanosize voids at a depth slightly sh...

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Bibliographic Details
Published in:Applied physics letters 2000-02, Vol.76 (9), p.1110-1112
Main Authors: Kooi, B. J., van Veen, A., De Hosson, J. Th. M., Schut, H., Fedorov, A. V., Labohm, F.
Format: Article
Language:English
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Summary:Cleaved MgO(100) single crystals were implanted with 30 keV He3 ions with doses varying from 1×1019 to 1×1020 m−2 and subsequently thermally annealed from 100 to 1100 °C. Transmission electron microscopy observations revealed the existence of sharply rectangular nanosize voids at a depth slightly shallower than the helium-implantation range. Monitoring of the defect depth profile and the retained amount of helium was performed by positron-beam analysis and neutron depth profiling, respectively.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.125954