Self-sustained secondary discharge in inductively coupled plasma reactor

This work reports on observations of intense atomic line radiation near a substrate during diamond film growth in an inductively coupled thermal plasma. Evidence is given, indicating that the radiation is caused by electron collisions which are driven by the radio-frequency field.

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Bibliographic Details
Published in:Applied physics letters 2000-05, Vol.76 (18), p.2508-2510
Main Authors: Walewski, Joachim, Larjo, Jussi, Hernberg, Rolf
Format: Article
Language:English
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Description
Summary:This work reports on observations of intense atomic line radiation near a substrate during diamond film growth in an inductively coupled thermal plasma. Evidence is given, indicating that the radiation is caused by electron collisions which are driven by the radio-frequency field.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.126391