IRMA: A tunable infrared multicomponent acquisition system for plasma diagnostics

A compact and transportable infrared multicomponent acquisition (IRMA) system based on infrared absorption spectroscopy has been developed for plasma diagnostics and control. The IRMA system contains four independent tunable diode lasers which can be temporally multiplexed and directed into plasma r...

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Bibliographic Details
Published in:Review of scientific instruments 2000-10, Vol.71 (10), p.3706-3710
Main Authors: Röpcke, J., Mechold, L., Käning, M., Anders, J., Wienhold, F. G., Nelson, D., Zahniser, M.
Format: Article
Language:English
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Summary:A compact and transportable infrared multicomponent acquisition (IRMA) system based on infrared absorption spectroscopy has been developed for plasma diagnostics and control. The IRMA system contains four independent tunable diode lasers which can be temporally multiplexed and directed into plasma reactors or into a multipass cell for exhaust gas detection. Rapid scan software with real-time line shape analysis provides simultaneous measurements of the absolute concentrations of several molecular species.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1290041