Quantitative evaluation of electron beam writing in passivated gold nanoclusters

We report a quantitative investigation of direct electron beam writing in monolayer films of passivated gold nanoclusters. In this process, the passivating organic ligands are (partially) removed to create gold-based nanostructures. We report the fabrication of lines with width as narrow as 26 nm, w...

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Bibliographic Details
Published in:Applied physics letters 2001-03, Vol.78 (13), p.1921-1923
Main Authors: Bedson, T. R., Palmer, R. E., Jenkins, T. E., Hayton, D. J., Wilcoxon, J. P.
Format: Article
Language:English
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Summary:We report a quantitative investigation of direct electron beam writing in monolayer films of passivated gold nanoclusters. In this process, the passivating organic ligands are (partially) removed to create gold-based nanostructures. We report the fabrication of lines with width as narrow as 26 nm, while measurements of the linewidth as a function of dose allow us to obtain a quantitative measure of the sensitivity, for comparison with established negative tone resists.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.1354154