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Silicon carbide and silicon carbide:germanium heterostructure bipolar transistors
In this letter, we report on heterostructure bipolar transistors (HBTs) based on silicon carbide (SiC) and a silicon carbide:germanium (SiC:Ge) alloy. The SiC:Ge base alloy was formed by the ion implantation of Ge into p-type 4H–SiC and subsequent annealing. HBT mesa structures were fabricated using...
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Published in: | Applied physics letters 2001-04, Vol.78 (14), p.2073-2075 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | In this letter, we report on heterostructure bipolar transistors (HBTs) based on silicon carbide (SiC) and a silicon carbide:germanium (SiC:Ge) alloy. The SiC:Ge base alloy was formed by the ion implantation of Ge into p-type 4H–SiC and subsequent annealing. HBT mesa structures were fabricated using a reactive ion etching process. The incorporation of Ge was found to increase the gain and the Early voltage of the devices. A common-emitter current gain (β) of greater than 3 was measured for the SiC:Ge HBTs. Homojunction SiC transistors were fabricated as a reference using the same process (except no Ge in the base region) and exhibited a β of 2.2. The transistors exhibited high breakdown voltages (>50 V without passivation), that typify SiC-based devices. These results indicate that SiC:Ge is a promising material for use in SiC-based heterostructure devices. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.1358851 |