Magnetic dome configuration for magnetron sputtering

In order to achieve sputter erosion on the entire target surface in magnetron sputtering devices, we have developed a new “magnetic dome” concept that involves the creation of separatrices and a null point within the sputter discharge volume. In the magnetic dome configuration the field lines coming...

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Bibliographic Details
Published in:Review of scientific instruments 2001-05, Vol.72 (5), p.2374-2379
Main Authors: Ejima, Seiki, Shimizu, Yoshiaki
Format: Article
Language:English
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Summary:In order to achieve sputter erosion on the entire target surface in magnetron sputtering devices, we have developed a new “magnetic dome” concept that involves the creation of separatrices and a null point within the sputter discharge volume. In the magnetic dome configuration the field lines coming out of the sputtering target are all bent back onto the target. The unique feature of this dome configuration is that it maximizes the capture efficiency for secondary electrons, i.e., secondary electrons emitted from the target during sputtering events are essentially all captured by the curved field lines and electrostatically trapped by the self-bias sputtering potential of the target sheath. A magnet set has been specially designed and constructed for reactive dc sputtering and used to demonstrate experimentally the erosion of an entire target surface in a magnetic dome.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1364669