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Ion-irradiation-induced mixing, interface broadening and period dilation in Pt/C multilayers
Pt/C multilayers of nanometric dimension have been irradiated with 2-MeV-Au ions to a fluence of 1×1014 ions/cm2 and analyzed by x-ray reflectivity and x-ray standing wave measurements. The multilayer period has expanded by ∼9%, the expansion of the Pt layers being larger than that of the C layers....
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Published in: | Applied physics letters 2001-07, Vol.79 (4), p.467-469 |
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Main Authors: | , , , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Pt/C multilayers of nanometric dimension have been irradiated with 2-MeV-Au ions to a fluence of 1×1014 ions/cm2 and analyzed by x-ray reflectivity and x-ray standing wave measurements. The multilayer period has expanded by ∼9%, the expansion of the Pt layers being larger than that of the C layers. Ion-induced displacement of atoms across the interfaces led to an increased interface roughness and an increase of 2 at. % Pt in C layers. Monte Carlo simulations for ion-induced atomic displacement have been used to explain the observed effects. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.1384901 |