Concurrent x-ray diffractometer for high throughput structural diagnosis of epitaxial thin films

We have developed a concurrent x-ray diffractometer that concurrently measures spatially resolved x-ray diffraction (XRD) spectra of epitaxial thin films integrated on a substrate. A convergent x-ray is focused into stripe on a substrate and the diffracted beam is detected with a two-dimensional x-r...

Full description

Saved in:
Bibliographic Details
Published in:Applied physics letters 2001-11, Vol.79 (22), p.3594-3596
Main Authors: Ohtani, M., Fukumura, T., Kawasaki, M., Omote, K., Kikuchi, T., Harada, J., Ohtomo, A., Lippmaa, M., Ohnishi, T., Komiyama, D., Takahashi, R., Matsumoto, Y., Koinuma, H.
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
cited_by cdi_FETCH-LOGICAL-c401t-f5e6ef47b778b3e1151961d03dbe131b500745925fe6be571c4b8343f71930613
cites cdi_FETCH-LOGICAL-c401t-f5e6ef47b778b3e1151961d03dbe131b500745925fe6be571c4b8343f71930613
container_end_page 3596
container_issue 22
container_start_page 3594
container_title Applied physics letters
container_volume 79
creator Ohtani, M.
Fukumura, T.
Kawasaki, M.
Omote, K.
Kikuchi, T.
Harada, J.
Ohtomo, A.
Lippmaa, M.
Ohnishi, T.
Komiyama, D.
Takahashi, R.
Matsumoto, Y.
Koinuma, H.
description We have developed a concurrent x-ray diffractometer that concurrently measures spatially resolved x-ray diffraction (XRD) spectra of epitaxial thin films integrated on a substrate. A convergent x-ray is focused into stripe on a substrate and the diffracted beam is detected with a two-dimensional x-ray detector. The obtained snapshot image represents a mapping of XRD intensity with the axes of the diffraction angle and the position in the sample. In addition to the parallel XRD measurements of thin films with various compositions and structures, two-dimensional spatial mapping of XRD peak with a resolution of ∼100 μm is demonstrated. This technique will provide us a high throughput characterization method of various devices composed of epitaxial films.
doi_str_mv 10.1063/1.1415402
format article
fullrecord <record><control><sourceid>crossref</sourceid><recordid>TN_cdi_crossref_primary_10_1063_1_1415402</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>10_1063_1_1415402</sourcerecordid><originalsourceid>FETCH-LOGICAL-c401t-f5e6ef47b778b3e1151961d03dbe131b500745925fe6be571c4b8343f71930613</originalsourceid><addsrcrecordid>eNotkE1PwzAQRC0EEqVw4B_4yiFlt2vHyRFVfEmVuMA5OKmdGLVxtXak9t9TRE-jGT3N4Qlxj7BAKOkRF6hQK1heiBmCMQUhVpdiBgBUlLXGa3GT0s-p6iXRTHyv4thNzG7M8lCwPcpN8J5tl-POZcfSR5ZD6AeZB45TP-ynLFPmqcsT2-2Jtv0YU0gyeun2IdtDOM15CKP0YbtLt-LK221yd-eci6-X58_VW7H-eH1fPa2LTgHmwmtXOq9Ma0zVkkPUWJe4Adq0DglbDWCUrpfau7J12mCn2ooUeYM1QYk0Fw__vx3HlNj5Zs9hZ_nYIDR_ahpszmroF4fSVuQ</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Concurrent x-ray diffractometer for high throughput structural diagnosis of epitaxial thin films</title><source>American Institute of Physics (AIP) Publications</source><source>American Institute of Physics:Jisc Collections:Transitional Journals Agreement 2021-23 (Reading list)</source><creator>Ohtani, M. ; Fukumura, T. ; Kawasaki, M. ; Omote, K. ; Kikuchi, T. ; Harada, J. ; Ohtomo, A. ; Lippmaa, M. ; Ohnishi, T. ; Komiyama, D. ; Takahashi, R. ; Matsumoto, Y. ; Koinuma, H.</creator><creatorcontrib>Ohtani, M. ; Fukumura, T. ; Kawasaki, M. ; Omote, K. ; Kikuchi, T. ; Harada, J. ; Ohtomo, A. ; Lippmaa, M. ; Ohnishi, T. ; Komiyama, D. ; Takahashi, R. ; Matsumoto, Y. ; Koinuma, H.</creatorcontrib><description>We have developed a concurrent x-ray diffractometer that concurrently measures spatially resolved x-ray diffraction (XRD) spectra of epitaxial thin films integrated on a substrate. A convergent x-ray is focused into stripe on a substrate and the diffracted beam is detected with a two-dimensional x-ray detector. The obtained snapshot image represents a mapping of XRD intensity with the axes of the diffraction angle and the position in the sample. In addition to the parallel XRD measurements of thin films with various compositions and structures, two-dimensional spatial mapping of XRD peak with a resolution of ∼100 μm is demonstrated. This technique will provide us a high throughput characterization method of various devices composed of epitaxial films.</description><identifier>ISSN: 0003-6951</identifier><identifier>EISSN: 1077-3118</identifier><identifier>DOI: 10.1063/1.1415402</identifier><language>eng</language><ispartof>Applied physics letters, 2001-11, Vol.79 (22), p.3594-3596</ispartof><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c401t-f5e6ef47b778b3e1151961d03dbe131b500745925fe6be571c4b8343f71930613</citedby><cites>FETCH-LOGICAL-c401t-f5e6ef47b778b3e1151961d03dbe131b500745925fe6be571c4b8343f71930613</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,782,784,27924,27925</link.rule.ids></links><search><creatorcontrib>Ohtani, M.</creatorcontrib><creatorcontrib>Fukumura, T.</creatorcontrib><creatorcontrib>Kawasaki, M.</creatorcontrib><creatorcontrib>Omote, K.</creatorcontrib><creatorcontrib>Kikuchi, T.</creatorcontrib><creatorcontrib>Harada, J.</creatorcontrib><creatorcontrib>Ohtomo, A.</creatorcontrib><creatorcontrib>Lippmaa, M.</creatorcontrib><creatorcontrib>Ohnishi, T.</creatorcontrib><creatorcontrib>Komiyama, D.</creatorcontrib><creatorcontrib>Takahashi, R.</creatorcontrib><creatorcontrib>Matsumoto, Y.</creatorcontrib><creatorcontrib>Koinuma, H.</creatorcontrib><title>Concurrent x-ray diffractometer for high throughput structural diagnosis of epitaxial thin films</title><title>Applied physics letters</title><description>We have developed a concurrent x-ray diffractometer that concurrently measures spatially resolved x-ray diffraction (XRD) spectra of epitaxial thin films integrated on a substrate. A convergent x-ray is focused into stripe on a substrate and the diffracted beam is detected with a two-dimensional x-ray detector. The obtained snapshot image represents a mapping of XRD intensity with the axes of the diffraction angle and the position in the sample. In addition to the parallel XRD measurements of thin films with various compositions and structures, two-dimensional spatial mapping of XRD peak with a resolution of ∼100 μm is demonstrated. This technique will provide us a high throughput characterization method of various devices composed of epitaxial films.</description><issn>0003-6951</issn><issn>1077-3118</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2001</creationdate><recordtype>article</recordtype><recordid>eNotkE1PwzAQRC0EEqVw4B_4yiFlt2vHyRFVfEmVuMA5OKmdGLVxtXak9t9TRE-jGT3N4Qlxj7BAKOkRF6hQK1heiBmCMQUhVpdiBgBUlLXGa3GT0s-p6iXRTHyv4thNzG7M8lCwPcpN8J5tl-POZcfSR5ZD6AeZB45TP-ynLFPmqcsT2-2Jtv0YU0gyeun2IdtDOM15CKP0YbtLt-LK221yd-eci6-X58_VW7H-eH1fPa2LTgHmwmtXOq9Ma0zVkkPUWJe4Adq0DglbDWCUrpfau7J12mCn2ooUeYM1QYk0Fw__vx3HlNj5Zs9hZ_nYIDR_ahpszmroF4fSVuQ</recordid><startdate>20011126</startdate><enddate>20011126</enddate><creator>Ohtani, M.</creator><creator>Fukumura, T.</creator><creator>Kawasaki, M.</creator><creator>Omote, K.</creator><creator>Kikuchi, T.</creator><creator>Harada, J.</creator><creator>Ohtomo, A.</creator><creator>Lippmaa, M.</creator><creator>Ohnishi, T.</creator><creator>Komiyama, D.</creator><creator>Takahashi, R.</creator><creator>Matsumoto, Y.</creator><creator>Koinuma, H.</creator><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20011126</creationdate><title>Concurrent x-ray diffractometer for high throughput structural diagnosis of epitaxial thin films</title><author>Ohtani, M. ; Fukumura, T. ; Kawasaki, M. ; Omote, K. ; Kikuchi, T. ; Harada, J. ; Ohtomo, A. ; Lippmaa, M. ; Ohnishi, T. ; Komiyama, D. ; Takahashi, R. ; Matsumoto, Y. ; Koinuma, H.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c401t-f5e6ef47b778b3e1151961d03dbe131b500745925fe6be571c4b8343f71930613</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2001</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Ohtani, M.</creatorcontrib><creatorcontrib>Fukumura, T.</creatorcontrib><creatorcontrib>Kawasaki, M.</creatorcontrib><creatorcontrib>Omote, K.</creatorcontrib><creatorcontrib>Kikuchi, T.</creatorcontrib><creatorcontrib>Harada, J.</creatorcontrib><creatorcontrib>Ohtomo, A.</creatorcontrib><creatorcontrib>Lippmaa, M.</creatorcontrib><creatorcontrib>Ohnishi, T.</creatorcontrib><creatorcontrib>Komiyama, D.</creatorcontrib><creatorcontrib>Takahashi, R.</creatorcontrib><creatorcontrib>Matsumoto, Y.</creatorcontrib><creatorcontrib>Koinuma, H.</creatorcontrib><collection>CrossRef</collection><jtitle>Applied physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Ohtani, M.</au><au>Fukumura, T.</au><au>Kawasaki, M.</au><au>Omote, K.</au><au>Kikuchi, T.</au><au>Harada, J.</au><au>Ohtomo, A.</au><au>Lippmaa, M.</au><au>Ohnishi, T.</au><au>Komiyama, D.</au><au>Takahashi, R.</au><au>Matsumoto, Y.</au><au>Koinuma, H.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Concurrent x-ray diffractometer for high throughput structural diagnosis of epitaxial thin films</atitle><jtitle>Applied physics letters</jtitle><date>2001-11-26</date><risdate>2001</risdate><volume>79</volume><issue>22</issue><spage>3594</spage><epage>3596</epage><pages>3594-3596</pages><issn>0003-6951</issn><eissn>1077-3118</eissn><abstract>We have developed a concurrent x-ray diffractometer that concurrently measures spatially resolved x-ray diffraction (XRD) spectra of epitaxial thin films integrated on a substrate. A convergent x-ray is focused into stripe on a substrate and the diffracted beam is detected with a two-dimensional x-ray detector. The obtained snapshot image represents a mapping of XRD intensity with the axes of the diffraction angle and the position in the sample. In addition to the parallel XRD measurements of thin films with various compositions and structures, two-dimensional spatial mapping of XRD peak with a resolution of ∼100 μm is demonstrated. This technique will provide us a high throughput characterization method of various devices composed of epitaxial films.</abstract><doi>10.1063/1.1415402</doi><tpages>3</tpages><oa>free_for_read</oa></addata></record>
fulltext fulltext
identifier ISSN: 0003-6951
ispartof Applied physics letters, 2001-11, Vol.79 (22), p.3594-3596
issn 0003-6951
1077-3118
language eng
recordid cdi_crossref_primary_10_1063_1_1415402
source American Institute of Physics (AIP) Publications; American Institute of Physics:Jisc Collections:Transitional Journals Agreement 2021-23 (Reading list)
title Concurrent x-ray diffractometer for high throughput structural diagnosis of epitaxial thin films
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-25T16%3A54%3A18IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-crossref&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Concurrent%20x-ray%20diffractometer%20for%20high%20throughput%20structural%20diagnosis%20of%20epitaxial%20thin%20films&rft.jtitle=Applied%20physics%20letters&rft.au=Ohtani,%20M.&rft.date=2001-11-26&rft.volume=79&rft.issue=22&rft.spage=3594&rft.epage=3596&rft.pages=3594-3596&rft.issn=0003-6951&rft.eissn=1077-3118&rft_id=info:doi/10.1063/1.1415402&rft_dat=%3Ccrossref%3E10_1063_1_1415402%3C/crossref%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c401t-f5e6ef47b778b3e1151961d03dbe131b500745925fe6be571c4b8343f71930613%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true