Amorphous layer formation at the TaC/Cu interface in the Si/TaC/Cu metallization system

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Bibliographic Details
Published in:Applied physics letters 2002-02, Vol.80 (6), p.938-940
Main Authors: Laurila, Tomi, Zeng, Kejun, Kivilahti, Jorma K., Molarius, Jyrki, Suni, Ilkka
Format: Article
Language:English
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ISSN:0003-6951
1077-3118
DOI:10.1063/1.1447601