Solar-blind AlGaN-based Schottky photodiodes with low noise and high detectivity

We report on the design, fabrication, and characterization of solar-blind Schottky photodiodes with low noise and high detectivity. The devices were fabricated on n−/n+ AlGaN/GaN heterostructures using a microwave compatible fabrication process. True solar-blind operation with a cutoff wavelength of...

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Bibliographic Details
Published in:Applied physics letters 2002-10, Vol.81 (17), p.3272-3274
Main Authors: Biyikli, Necmi, Aytur, Orhan, Kimukin, Ibrahim, Tut, Turgut, Ozbay, Ekmel
Format: Article
Language:English
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Summary:We report on the design, fabrication, and characterization of solar-blind Schottky photodiodes with low noise and high detectivity. The devices were fabricated on n−/n+ AlGaN/GaN heterostructures using a microwave compatible fabrication process. True solar-blind operation with a cutoff wavelength of ∼274 nm was achieved with AlxGa1−xN (x=0.38) absorption layer. The solar-blind detectors exhibited
ISSN:0003-6951
1077-3118
DOI:10.1063/1.1516856