Loading…

Single-step fabrication of silicon-cone arrays

A regular lattice of SiO2 microspheres on a quartz support is used as a microlens system for laser-induced single-step fabrication of arrays of silicon cones on a (100) Si surface. The experiments were performed with single-pulse 248 nm KrF laser radiation.

Saved in:
Bibliographic Details
Published in:Applied physics letters 2003-02, Vol.82 (5), p.692-693
Main Authors: Wysocki, G., Denk, R., Piglmayer, K., Arnold, N., Bäuerle, D.
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A regular lattice of SiO2 microspheres on a quartz support is used as a microlens system for laser-induced single-step fabrication of arrays of silicon cones on a (100) Si surface. The experiments were performed with single-pulse 248 nm KrF laser radiation.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.1538347