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Single-step fabrication of silicon-cone arrays
A regular lattice of SiO2 microspheres on a quartz support is used as a microlens system for laser-induced single-step fabrication of arrays of silicon cones on a (100) Si surface. The experiments were performed with single-pulse 248 nm KrF laser radiation.
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Published in: | Applied physics letters 2003-02, Vol.82 (5), p.692-693 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | A regular lattice of SiO2 microspheres on a quartz support is used as a microlens system for laser-induced single-step fabrication of arrays of silicon cones on a (100) Si surface. The experiments were performed with single-pulse 248 nm KrF laser radiation. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.1538347 |