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Phase-unifying mirrors for high-power XeF excimer lasers
A phase-unifying unstable cavity of magnification factor M=5.8 has been applied to a high-power, commercial XeF laser, and the measurements for characterizing near- and far-field beam properties are reported. A laser beam of 280 mJ, 30 ns duration, a cross section of 2.4×1.3 cm2, and a beam quality...
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Published in: | Applied physics letters 2003-03, Vol.82 (12), p.1809-1811 |
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Main Authors: | , , , , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | A phase-unifying unstable cavity of magnification factor M=5.8 has been applied to a high-power, commercial XeF laser, and the measurements for characterizing near- and far-field beam properties are reported. A laser beam of 280 mJ, 30 ns duration, a cross section of 2.4×1.3 cm2, and a beam quality factor of 4.3 along the discharge direction (x axis) and of 2.1 along the y direction has been obtained. The beam exhibits a smooth far-field profile with more than 90% of the total near-field energy within a far-field full angle θ⩽0.04 mrad. The beam angular stability is of 0.009 and of 0.004 mrad along x and y, respectively. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.1562345 |