Microcantilevers integrated with heaters and piezoelectric detectors for nano data-storage application

A thermomechanical writing system and a piezoelectric readback system have been demonstrated using silicon cantilevers integrated with heaters and piezoelectric sensors for a low-power scanning-probe-microscopy data-storage system. A thin polymethylmethacrylate film has been used as a media to recor...

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Bibliographic Details
Published in:Applied physics letters 2003-12, Vol.83 (23), p.4839-4841
Main Authors: Lee, Caroline Sunyong, Nam, Hyo-Jin, Kim, Young-Sik, Jin, Won-Hyeog, Cho, Seong-Moon, Bu, Jong-uk
Format: Article
Language:English
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Summary:A thermomechanical writing system and a piezoelectric readback system have been demonstrated using silicon cantilevers integrated with heaters and piezoelectric sensors for a low-power scanning-probe-microscopy data-storage system. A thin polymethylmethacrylate film has been used as a media to record data bits of 50 nm in diameter and 25 nm in depth using the silicon cantilever. The sensitivity of 0.22 fC/nm was also obtained using the fabricated cantilever. Finally, to obtain readback signals using the piezoelectric cantilever, a patterned oxide wafer with 30 nm depth was scanned to show the distinctive charge signals.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.1633009