USE OF CHARACTERISTIC X RAYS TO MONITOR ANNEALING OF ION-IMPLANTED DIAMOND

Bombardment of aligned type-IIa diamond substrates with 80-keV protons and simultaneous detection of the resulting characteristic carbon K x rays has revealed excellent channeling structure. This technique has been used to monitor the crystallinity of a surface implanted with P31+ ions. Crystallinit...

Full description

Saved in:
Bibliographic Details
Published in:Applied physics letters 1969, Vol.14 (9), p.295-297
Main Authors: Davidson, L. A., Gibbons, James F., Der, R. C., Kavanagh, T. M., Khan, J. M.
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Bombardment of aligned type-IIa diamond substrates with 80-keV protons and simultaneous detection of the resulting characteristic carbon K x rays has revealed excellent channeling structure. This technique has been used to monitor the crystallinity of a surface implanted with P31+ ions. Crystallinity was destroyed by P31+ does of the order of 1014/cm2. Vacuum annealing at 950°C restored the diamond cubic crystal structure.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.1652821