Determination of Argon in Thin Films by rf Spark-Source Mass Spectrography

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Bibliographic Details
Published in:Journal of applied physics 1968-01, Vol.39 (13), p.6106-6107
Main Authors: Oblas, Daniel W., Hoda, Helen
Format: Article
Language:English
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ISSN:0021-8979
1089-7550
DOI:10.1063/1.1656128